[27] Highly c-oriented PbZr_0.48Ti_0.52O₃ thin film on glass substrate

We obtained preferentially (220)-oriented yttria-stabilized zirconia (YSZ) buffer layers on glass substrates by pulsed laser deposition. These preferentially (220)-oriented YSZ buffer layers enabled us to grow preferentially (100)-oriented SrRuO₃ bottom electrodes. On the preferentially (100)-oriented SrRuO₃ bottom electrodes, we obtained preferentially c-oriented PbZr_0.48Ti_0.52O₃ (PZT) thin films, which were confirmed by an X-ray diffraction experiment. The highly c-oriented PZT thin films exhibited a high ferroelectric polarization of about 32 um/cm². We also checked a high storage density of about 10 Tbit/in² with a minimum bit size below 8 nm with the highly c-oriented PZT thin films by electric force microscope.